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The construction and operation of plasma cleaning equipment

Author： Shenzhen three and wave of Electrical and Mechanical Technology Co., LtdIssuing Time：2017-08-03 09:08:54Pageviews：4308【smallmediumbig】

According to the use of different, can choose a variety of construction of the plasma cleaning equipment, and by selecting the type of gas, the basic structure of the device is roughly the same, the general device can be vacuum chamber, vacuum pump, high frequency power, click, gas System, work transmission system and ...
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The basic structure of the plasma cleaning equipment:

According to the use of different, can choose a variety of construction of the plasma cleaning equipment, and by selecting the type of gas, the basic structure of the device is roughly the same, the general device can be vacuum chamber, vacuum pump, high frequency power, click, gas System, work transmission system and control system and other components. Usually used in the vacuum pump is a rotary oil pump, high-frequency power supply is usually 13.56MHz radio waves, the equipment is running as follows:

(1) The workpiece to be cleaned is sent to the vacuum chamber and fixed, and the running device is started to start the exhaust, so that the vacuum degree of the vacuum chamber reaches the standard vacuum of about 10 Pa. General exhaust time takes about 2min.

(2) A gas for plasma cleaning was introduced into the vacuum chamber and the pressure was maintained at 100 Pa. According to the cleaning material is not used, can be used oxygen, hydrogen, or nitrogen and other gases.

(3) applying a high-frequency voltage between the electrode in the vacuum chamber and the grounding device, causing the gas to be punctured and ionizing and generating plasma by glow discharge. So that the plasma generated in the vacuum chamber completely enveloped in the workpiece to be processed, began cleaning operations. The general cleaning process lasts for several tens of seconds to several minutes.

(4) after cleaning is cut off the high-frequency voltage, and the gas and vaporized dirt discharged, while the vacuum chamber into the gas, and the pressure to an atmospheric pressure.
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Shenzhen three and wave of Electrical and Mechanical Technology Co., Ltd
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