创盈 Features

PT-5ST

Cavity material: stainless steel surface treatment

Power supply: AC220V

创盈 Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

创盈 RF power supply: 0-300W adjustable (RF matching integrated)

RF frequency: 13.56MHz

Frequency offset: less than 0.2KHz

Characteristic impedance: 50 ohms, automatic matching

Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

Gas flow rate: 10-300ml/min (adjustable)

创盈 Process control: PLC man-machine interface automatic and manual mode

Cleaning time: 1-99999 seconds adjustable

创盈 Power size 10%-100% adjustable

Inner cavity size Φ150×270Lmm 5L

Dimensions: 560 × 540 × 1250mm L × W × H

创盈 Vacuum pump: 2XZ-4 (pumping speed 2L/S)

Vacuum chamber temperature: less than 30 ° C

创盈 Cooling method: forced air cooling

创盈 Features

PT-5ST

创盈 Cavity material: stainless steel surface treatment

Power supply: AC220V

Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

创盈 RF power supply: 0-300W adjustable (RF matching integrated)

RF frequency: 13.56MHz

创盈 Frequency offset: less than 0.2KHz

创盈 Characteristic impedance: 50 ohms, automatic matching

创盈 Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

创盈 Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

Gas flow rate: 10-300ml/min (adjustable)

创盈 Process control: PLC man-machine interface automatic and manual mode

Cleaning time: 1-99999 seconds adjustable

创盈 Power size 10%-100% adjustable

Inner cavity size Φ150×270Lmm 5L

Dimensions: 560 × 540 × 1250mm L × W × H

Vacuum pump: 2XZ-4 (pumping speed 2L/S)

Vacuum chamber temperature: less than 30 ° C

创盈 Cooling method: forced air cooling